MEMS

It gives full preparation to extract and analysis dynamic characteristics of MEMS devices.

从而为后续MEMS器件动态特征的提取和分析做充分的准备。

Studying on dynamic characteristic of MEMS micro-device depends on relevant testing system.

MEMS微器件动态特性的研究需要相应的测试系统.

A micro direct methanol fuel cell ( μ DMFC ) using MEMS technology is reported.

报道了一种利用MEMS技术制作的微型直接甲醇燃料电池.

Recently various types of attenuators have been realized which include the use of mechanism, magnetic-optical effect, thermo-optical effect, electro-optic effect, acoustic-optical effect, MEMS, optical wave-guide and so on.

当前光衰减器的主流技术有很多种，包括机械型，磁光效应，热光效应，电光效应，声光效应，MEMS技术及光波导技术等。

A novel dual-band MEMS LNA design bimetal strip-type fixed temperature detector

一种双波段MEMS低噪声放大器设计双金属定温火灾探测器

Interface Technology of MEMS CAD System Level Design with a Standard Layout Output

一种MEMS CAD系统级到工艺级版图生成技术

The development of Power MEMS is associated with MEMS closely.

PowerMEMS (功率微机电系统)与MEMS( 微机电系统)发展密切相关.

MEMS material database is a necessary tool for MEMS design.

MEMS材料数据库已经成为MEMS设计领域中必不可少的设计工具.

Design and phase noise analysis of a MEMS varactor is presented.

给出了一种MEMS压控电容的设计和相位噪声分析结果.

With the rapid development of MEMS, study of micro helicopter has been a hotpot in this field.

随着微电子机械系统（MEMS）的迅猛发展，自主式微直升机的研究也已成为这一领域内的研究热点之一。

The State of the Art in Technologies and Applications of MEMS

MEMS技术及应用的新进展

The micro aerocraft with MEMS ( Micro Electro Mechanical Systems) technology is one of the most attractively fields of aerospace field. The micromation of power plant is the key technology of micro aerocraft.

以MEMS（Micro Electro Mechanical Systems）技术为基础的微飞行器是目前航空航天领域最具吸引力的产品之一，而动力装置的微型化问题则是性能更强更灵活的新型微飞行器的关键技术。

With high precision, wide dynamic range, small size and low power consumption, silicon resonant accelerometer ( SRA) potentially earns a wide application spectrum in the military, civil fields. SRA has become a hot research topic for MEMS inertial sensors.

硅微谐振式加速度计（Silicon Resonant Accelerometer，简称SRA）以其高精度、宽动态范围、低功耗和小尺寸等特点，广泛应用于军事及民用等领域，成为MEMS惯性传感器的研究热点之一。

Thought to be the next big wave, MEMS-based optical switching devices fizzled when the telecommunications market imploded.

随著电讯市场萎缩，曾经被认为是下一波热门产品的mems光学交换设备也跟著消失。

Polyimide has become a main material for sacrificial layer in MEMS switch.

目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.

Then, communication devices based on MEMS technology their applications are reviewed.

重点综述了基于MEMS技术的通信器件及其应用.

The compensating method for MEMS gyroscope random drift error is discussed.

从工程实用的角度出发,探讨了MEMS陀螺仪随机漂移误差的有效补偿方法.

Piezoelectric actuator is one of the most development prospects in MEMS actuators.

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一.

A MEMS sensor research platform based on micro-converter AD μ C 832 is presented.

提出一种基于微转换器(Micro-Converter)的MEMS传感器组合研究平台.

A survey of current international research on MEMS is presented.

本文对国外微电子机械系统(MEMS) 的研究现况作了评述.

A RF MEMS switch is designed by computer aided design ( CAD ) method.

应用计算机辅助设计 ( CAD ) 方法模拟设计一种射频微机械(RF-MEMS)开关.

A novel mems shock switch with movable contact point to prolong contact time

通过可动触点延长接触时间的新型微冲击开关

To ensure high performance of MEMS, the system level design is of great importance.

MEMS的系统级设计对保证其整体综合性能和合理开发MEMS产品至关重要。

Improved temperature error model of silicon MEMS gyroscope with inside frame driving

改进的内框架驱动式硅MEMS陀螺温度误差模型

Study on a MEMS fatigue testing device based on the resonance principle

基于谐振原理的微机械疲劳试验装置的研究

Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.

基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。

The automatic optimization algorithms of structural parameters of MEMS devices are studied.

研究了MEMS器件结构参数的自动优化算法及其实现技术.

The widely use of MEMS prompted the extensive research of Power MEMS.

随着微机电系统(MEMS) 的快速发展,为MEMS提供 电能的微小型功率器件(PowerMEMS)逐步得到了广泛的研制.

Then, the side feed pattern reconfigurable antenna is improved and the structure is suitable for processing. Last, the processing and test of MEMS reconfigurable antenna is studied and discussed, a processing scheme which is suitable for the antenna design is proposed.

之后对侧馈形式的方向图可重构天线进行了改进，得到了适合加工的天线结构；最后，对MEMS可重构天线的加工测试进行了讨论和研究，提出了适合于所设计天线的加工方案。

It is useful for the design and researchment of MEMS devices.

这对MEMS器件的设计与研究具有重要意义.