gettering

MEMC company, a worldwide leading silicon wafer manufacturer, has developed a rapid-thermal-processing ( RTP) based internal gettering ( IG) technology named after" magic denuded zone"( MDZ(?)), taking advantage of vacancy enhancement of oxygen precipitation.

MEMC公司根据空位对氧沉淀的促进作用采用快速热处理（RTP）技术开发出一种新型的内吸杂工艺&魔幻洁净区工艺（MDZ（？）

test method for gettering properties of non-evaporable getter

GB/T9506.8-1988非蒸散型吸气剂吸气性能测试方法

the investigation and improvement of low temperature annealing process in intrinsic gettering technique

氧本征吸除低温退火工艺的研究和改进

gettering of defects in polycrystalline silicon solar cells by porous silicon

多孔硅对多晶硅太阳电池中缺陷和杂质的吸除效应

intrinsic gettering technology and application in msi and lsi

内吸除技术在MSI和LSI中的应用

research on phosphorous/ aluminum gettering of cz-si in solar cells

太阳电池用直拉硅片中磷铝吸杂的应用研究

determination of the deep levels in silicon and observation of the gettering effect to impurities with the multi-crystal layer

硅中深能级杂质的测定与多晶硅薄膜吸杂效果的观察

moreover, the gettering effect is evident with the aluminum layer increasing.

在不同厚度的铝膜的铝吸杂过程中，发现随着铝膜厚度的增加，吸杂效果更为明显。

the displacement of impurities in the ion implantation gettering technique

离子注入吸杂技术中杂质的转移

the polysilicon can enhance oxygen precipitation nucleating and growing, acting as the intrinsic gettering.

多晶硅能促进硅片内的氧沉淀成核和生长，起内吸杂作用。

impurity gettering of polycrystalline silicon solar cells by laser damage

多晶硅太阳电池激光损伤杂质吸除

sims analysis of ti-ta gettering wire

Ti-Ta吸气丝的SIMS分析

a rebound in the noise magnitude is observed for long gettering times.

稍长时间吸杂则噪声趋高。

intrinsic gettering technology used in the process of silicon wafer and silicon device

硅片和硅器件工艺中的本征吸除技术

theoretic analysis of intrinsic gettering and selection of annealing conditions

本征吸杂技术若干理论分析及退火工艺条件选择

study on gettering of low contamination by helium-implantation-formed cavities in silicon

氦诱生微孔对硅中低浓度杂质吸除的研究

silicon gettering technique physical mechanism of gettering in silicon

硅中吸除技术的物理机制

improvement of plasma performance with titanium gettering in the hl-1 tokamak silicon gettering technique

用钛吸气方法改善HL-1装置的等离子体性能

investigation of oxygen precipitation and internal gettering in czochralski silicon

直拉硅单晶的氧沉淀及内吸杂的研究

silicon gettering technique study of intrinsic gettering for ntdczsi

NTDCZSi内吸除技术的研究

Influence of Al BSF Gettering on Minority Carrier Lifetime in Silicon Solar Cell

硅光单体电源铝背场吸杂对非平衡少子寿命的影响

applied p/ al gettering on polycrystalline solar cells

磷铝吸杂在多晶硅太阳电池中的应用

in order to increase the minority carrier lifetime, the mechanism of phosphorus gettering is studied.

研究了为提高基区少子寿命而进行磷吸收的机理。

many gettering techniques have been widely studied to overcome this problem by removing metal impurities from active regions of device.

高注量的氦注入硅中并经热处理所形成的微孔，对金属原子的吸除作用已为大量的研究所证实。

The repeated reactivation properties of Zr-Al getter pump are experimentally studied. The fallowing results are pointed out: after each times reactivating, the decreasing of sorption rate is in turn 5%, the decreasing of gettering quantity is in turn 17%.

实验研究了锆铝吸气剂泵的多次再生的性能，结果表明，每经一次再生，抽速递减5%，吸气量递减17%。

study of gettering effects of polysilicon

多晶硅吸杂效能的研究

the mechanism of the duration of polysilicon gettering is proposed.

本文提出了多晶硅持续吸杂的机理。

Oxgen precipitates ( useful for gettering ) can reduce the yield strength ( critical shear stress ) up to fivefole.

氧沉淀 ( 可用作吸杂 ) 会使屈服强度 ( 临界剪应力 ) 降低为五分之一.

gettering of defects in silicon by porous silicon

多孔硅对硅中缺陷的吸除效应

a new technology of intrinsic gettering process

本征吸收新工艺