after analyzing the probe radius compensation technology during surface measuring, a new probe radius compensation technology based on the normal vector of nurbs surface is proposed and the problem of measure point planning is simply analyzed.
在此基础上重点分析了曲面测量过程中的测头半径补偿技术,提出了基于NURBS曲面法矢的测头补偿技术,并简单分析了曲面测量时的测点规划问题。
By means of SiO 2 mask and SF 6 etching corrosive, the cantilever beam with tip is shaped by reactive ion etching once through operation. The probe has been shaped by wet corrosive and the tip radius is about 50 nm.
以SiO2为掩模,SF6刻蚀硅,用RIE与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针,针尖半径约50nm。
calculation for compensating error of stylus radius of cmm probe
三坐标测量机测头的测球半径补偿误差的计算
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