scanning interferometer

Through miniaturization design of optical system and scanning system, the fiber absolute distance measurement interferometer is reduce to volume of 600mm × 250mm × 250mm.

通过光学系统和扫描系统的小型化设计，设计了体积为600mm×250mm×250mm的光纤绝对测距仪器；

A scanning corner cube retro-reflector ( CCR) method is also presented to test the emergent wavefront of the large interferometer.

提出了一种角锥棱镜扫描法，检测大口径干涉仪出射波前的准直性，指导干涉仪波前准直性的校准。

In this paper, the scanning interferometer with confocal spherical cavity structure is described, which is operated round 0.85 μ m and 1.3 μ m respectively.

本文描述了用于近红外（0.85μm、1.3μm）的共焦球面腔结构的扫描干涉仪。

The hardware system of three-dimension scanning of interferometer was designed. The scanning precision of two-dimension horizontal system and the structure and precision of vertical PZT system were analyzed.

叙述了三维扫描系统的硬件实现，分析了二维水平扫描系统的扫描精度和垂直压电陶瓷微位移系统的结构和精度。