thin film sensor

The thin film sensor shows good repetition and stability in 3 weeks.

该薄膜传感器在3星期内显示了良好的重复性和稳定性；

Development of a Cryogenic Carbon Thin Film Sensor

碳膜低温传感器的研制

ZnO/ SnO_2Bilayer Thin Film Gas Sensor

ZnO/SnO2双层薄膜型气敏传感器

Requirement of Substrate in thin film magneto sensor is reported. In accordance with the requirement, We select silicon and ferrite of high density as substrate. SiO2 is made insulation film on the substrate.

本文论述了薄膜磁敏元件对基片的要求，依此要求选择硅和高密度铁氧体为基片，上面制备SiO2作绝缘膜。

Silicon integrated thin film microelectrode based electrochemical sensor devices has been fabricated using silicon micromachining techniques.

研究讨论了硅一体化微机械结构型薄膜微电极电化学传感器件的稳定性及其相关的电化学问题.

A new cryogenic carbon thin film resistance sensor which is of small size, low heat capacity, high sensitivity, fast response and small magnetoresistance is reported.

报道了一种体积小、热容低、灵敏度高、热响应速度快、不易受强磁场影响的新型碳膜电阻低温传感器。

Developing of Diamond Thin Film Pressure Sensor

金刚石薄膜压力传感器研制

For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thin-film gas sensing basic material was developed.

针对金属氧化物薄膜气敏元件传统制造工艺中存在的掺杂不稳问题，开发了一种实用化的ZnO薄膜气敏基材料。

Design of Magneto-Optic Thin Film Current Sensor

磁光薄膜电流传感器

Polysilicon Thin Film Pressure Sensor with Stress Concentration

应力集中式多晶硅薄膜压力传感器

In the end, this thesis comes up wth problems discovered in the test and look forward to the prospect of thin film sensor.

最后提出了实验中发现的问题，并对薄膜传感器的发展做出了展望。

Polymer Resistive Thin Film Humidity Sensor& Investigation on Device Construction 、 Aging Mechanism and Humidity Sensing Mechanism

高分子电阻型薄膜湿度传感器&元件构造、老化机理、感湿机理探讨

A multilayers thin film gas sensor of crox/ sno2 made by sol-gel method

溶胶－凝胶法制备CrO x／SnO2多层薄膜气体传感器

An investigation of High TCR thin film temperature sensor

高TCR薄膜温度传感器的研究

Thin-film sensor for two kinds of gases

双敏薄膜气体传感器的研究

Design of a Humidity Controller Using Thin Film Humidity Sensor

使用薄膜湿敏元件的湿度控制器的设计

Principle and Development of Thin Film Thermocouple Sensor for Measuring Dynamic Cutting Temperature of Chemical Explosive Material

化爆材料动态切削温度的薄膜热电偶测量原理及传感器研制

A Novel Mercury Ion Selective Thin Film Sensor

一种新型汞离子选择薄膜传感器

A new kind of thin film manganin sensor is fabricated by developing structure design, new sensing and packaging materials, and adopting new fabrication technique.

通过传感器的结构设计、敏感材料和封装材料的研制以及采用新的传感器制备工艺，制作了一种新型的薄膜式锰铜传感器。采用熔融石英材料作为绝缘基板。

Review of Multilayer Thin Film Gas Sensor

多层薄膜气敏材料研究概况

The sensitivity of nano thin film gas sensor to hydrogen sulfide could be affected by the doping amount of P-type metal oxides.

P型金属氧化物半导体的掺杂量会影响纳米薄膜气敏元件对硫化氢的灵敏度。

In this article, the status and development trend, the key technology and the application of alloy thin film piezoresistive sensor are reviewed.

综述了合金薄膜应变压力传感器的现状、发展趋势、技术关键及应用情况。

Abstract A polysilicon thin film pressure sensor is presented.

介绍一种以多晶硅薄膜为敏感材料的压力传感器。

Various performance compensation methods have been designed according to the characteristic of the thin film pressure sensor.

针对薄膜压力传感器的特性，设计各种性能补偿方法。

Thin Film Reluctive Sensor and It's Application

薄膜磁阻传感器及其应用

By studying the sensitivity of Pt-DEB thin film sensor to methane gas CH4, the film sensors was hard to return to initial frequency after the absorption of CH4. And the sensitivity to CH4 with different concentration presented a character of nonlinear.

研究表明Pt-DEB薄膜QCM传感器在室温下对于瓦斯气体CH4的敏感特性，发现对CH4气体发生吸附过程后，很难回到初始频率，并且对不同浓度的瓦斯气体响应灵敏度呈非线性。

The thin film sensor with rapid detection, few sample solution and broad measuring dynamic range, increases sensitivity for its potentiometric signal is transformed to alternating-current signal agitated by light to measure.

该传感器具有测量快速灵活、所需样品少、动态范围宽等特点，因为把电位信号转化为对光激发的交流电流信号进行测量，所以提高了灵敏度。

Thin film sensor application in smart bearing

智能轴承用薄膜传感器

Development and Investigation Trends of Alloy Thin Film Piezoresistive Sensor

合金薄膜电阻应变式压力传感器的研究进展

The Ft thin film temperature Sensor design. technological process. Pt-film, Substrate and packaging material and their relationship have been discussed.

本文讨论了铂薄膜温度传感器的设计、制造工艺、膜料与衬底及封装材料的关系。