微力

The feasibility of the measurement program is analyzed theoretically and the experimental platform is built to verify the correctness of the principle.

文中提出了一种基于静电场的微力测量方案，对测量方案的可行性做了理论分析并搭建实验平台，验证了原理的正确性。

The structure and the principle of a 3-dimensional micro force sensor is introduced.

3维微力传感器是基于半导体应变测试技术制成的多维力传感器，介绍了它的结构和原理。

This paper presents the design of a polymer micro-force sensor and novel processing technologies are adopted to make it.

本文设计了一款聚合物材料的微力传感器，并且采用了新颖的加工工艺将其制作出来，随后对其进行了相关的测试。

The sensor array is made up of 16 3-dimensional micro force sensors. It is a 4 × 4 array.

将16个3维微力传感器组成规模为4×4的传感器阵列。

This gun has a hair trigger.

这支枪装着微力扳机.

The major work was summarized as follows: According to the electrostatic force generation principle, ultramicro-force measurement scheme using electrostatic field method was designed.

具体工作如下：基于静电力发生原理，完成了静电场测量微力方案的系统设计。

Using the micro-force sensor of10 μ m width, we successfully measure the clamping forces of different jaw and compare the measured values with the simulation values.

本文利用10μm线宽的微力传感器成功测量出了微夹钳不同钳口距离下的夹持力，并且将测量值与仿真值进行了比较。

You're saving, and I'm doing my little all that road.

你是在攒钱，我也在那条路上尽我的微力。

In order to satisfy this request, a novel micro-gripper integrating tri-axial micro-force sensor, based on the technology of piezoresistive detection, is presented.

因此，该文提出了一种以压阻检测技术为基础，集成三维微力传感器的微夹持器。

A Micro-force Sensing Integrated Piezoelectric Micro gripper

一种集成微力检测的压电式微夹钳

Micro-force sensor is a kind of indispensable sensor in the field of microelectro mechanical systems ( MEMS). However, there are relatively few sensors for micro force detecting among the existing sensors.

微力传感器是微机电系统（MEMS）领域中不可缺少的一种传感器，在现有力传感器的研究中，能够对微小力测量的传感器相对较少。

Development of micro force sensor

小型微力传感器的研制

He did the little that he could.

他尽到了他仅有的微力。

Design and Implementation of Precise Micropressure Measuring System of Laser Platform

激光平台精密微力测量系统的设计与实现

Micromanipulation Robot Based on Hybrid Control of Micro-vision and Micro-force Flexible Control

基于显微视觉与微力觉柔顺混合控制的微操作机器人

In chapter 2, the breaking strength of the crystalline silicon was studied through the micro force-displacement balance.

第二章讲述了单晶硅的破坏强度问题，并用微力微位移天平方法进行研究。

The setup consists of four main parts: the main supporting parts, bidirectional driving parts, micro force sensors and micro specimen supporting platforms. The setup employs displacement controlled loading technique, and the sequential deformation images can be recorded simultaneously.

装置由主体支撑部分，压电双向驱动部分，微力检测传感器以及试件加载平台四部分组成，能在位移控制模式下（最小65nm）连续原位检测微区域的变形。

The calibration of high precision micro-force sensor is completed, and the dynamic calibration of the relationship between current and force is also finished.

完成了高精度微力传感器的标定，动态标定了电流和拉伸力的对应关系，从而实现了拉伸力的开环控制。

When the device for measuring micro-force meets the measurement range, Structure parameters are optimized by numerical analysis and the minimum resolution and structural parameters are calculated.

通过数值分析方法对微力测量装置的结构参数进行优化，在满足微力测量范围的前提下，计算出微力测量装置的最小分辨率以及相应的结构参数。

The facility includes piezoelectric actuator, displacement sensor, force sensor, dynamic and static loading platform, precision positioning stage, image acquisition.

整个实验装置由压电陶瓷制动器、位移检测传感器、微力检测传感器、动静载物台、五维精密定位台、图像采集等主要部件组成。

Development of a Micro-gripper Integrating Tri-axial Force Sensor

一种集成三维微力传感器的微夹持器研制

Detection Methods of Super-micro Force in SFM

扫描力显微镜中超微力的探测方法

Mary: I'm filthy rich! Haven't you heard about the MicroPower deal?

玛莉：我发财了！你没听说过“微力”的案子吗？

A Six DOF Force/ Torque Sensor Used in MEMS Sample Testing

一种用于MEMS样品测试的六轴微力传感器

Piezoelectric cantilever sensor is a kind of device that can transform tiny pressure into electrical signal.

压电悬臂梁传感器是一种将微力信号转换成电信号的装置。

One set is the calibration system of the micro-force sensor, which is used for the deflection sensitivity measurement and the force sensitivity calibration.

一套为传感器的标定装置，其作用是完成对微力传感器偏转灵敏度的测量和力灵敏度的标定。

Preliminary Study of Calibration System Based on Silicon PZT Microsensor

基于硅基PZT微力传感器标定系统的初步研究

Study on an integrated five-dimension micro force/ torque sensor

集成式五维微力/力矩传感器的研究

PZT thin film was fabricated on substrate Pt/ Ti/ SiO2/ Si < 100> by sol-gel method, then annealed in temperature of 600 ℃, PZT micro-force sensors were manufactured by MEMS silicon manufacturing processes.

PZT薄膜在基体Pt/Ti/SiO2/Si（100）上用溶胶一凝胶法制备，然后在600℃下退火。PZT微力传感器完全由MEMS体硅加工工艺来实现。

In this thesis, the preparation and characteristic of PZT thin films with and without doping for piezoelectric sensor were investigated.

本论文的内容是关于用于压电微力传感器的PZT薄膜的制备及掺杂改善薄膜性能的研究。