Through analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got.

  • 通过分析用于检测流体参数的微型热敏传感器的工作原理,针对恒流和恒温驱动电路驱动的此类传感器组成的系统,提出了对微型热敏传感器系统动态特性分析的依据和计算设计方法。

  • 互联网摘选 2026-07-14 20:40:46

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