reactive etching的例句大全

The waveguide device was fabricated by-coating films , using aluminum as mask and oxygen reactive ion etching.

我们采用旋涂 、 铝掩膜和氧反应离子刻蚀的方法(RIE)制得了聚合物阵列式光波导器件.

The experiment of fully automatic reactive ion etching on 3 inch GaAs wafer is described.

介绍了全自动反应离子腐蚀3英寸GaAs片的实验研究工作。

By means of SiO 2 mask and SF 6 etching corrosive, the cantilever beam with tip is shaped by reactive ion etching once through operation. The probe has been shaped by wet corrosive and the tip radius is about 50 nm.

以SiO2为掩模，SF6刻蚀硅，用RIE与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针，针尖半径约50nm。

Finally, discussed are etching mechanism, polishing principles, and control of reactive versions of the InP material.

文章最后讨论了InP材料的腐蚀机理 、 抛光原理及化学反应类型的控制.

Study on Deep Reactive Ion Etching of Polymethylmethacrylate Sheet Microstructure

商品有机玻璃片微结构的深刻蚀研究